The system is stripped completely down to the bare frame. The same is performed on all included power supply and auxiliary racks.

  The chambers, top and bottom plates, and other components are cleaned to remove all residual material. Chemical cleaning is utilized where necessary. Sealing surfaces are resurfaced by milling where needed, and then electro polished to reduce the surface area so fewer gas molecules can adhere.

  The system frame, head, electronic assemblies, RF Generator, and all frame and miscellaneous panels are painted to the original manufacturer’s color and quality specification, or to a customer specified color combination. All controller front panels are repainted and silk-screened. All valves are removed and evaluated for operation. Upon evaluation, each valve is rebuilt or replaced with a newer and more efficient model.

  The mechanical pumps are sent to the original manufacturers or designated representatives for rebuilding (this allows our customers to receive the manufacturer’s warranty). All gate and throttle valves are replaced.

  The entire vacuum system is removed and cleaned. All o-rings and centering rings are replaced to ensure vacuum integrity

  Once the system is assembled, a pump-down period is conducted to achieve base vacuum then a mechanical wafer cycling is run. Each system must cycle a predetermined number of wafers, without error, before it is released from final test.