Remanufactured System and Chamber

  SYSTA provides comprehensive remanufacturing services for Novellus, AMAT semiconductor production equipment and critical subsystems.

  Specializing in CVD remanufacturing, we leverage our highly specialized in-house remanufacturing and field services team, who has been experienced for more than 20 years in this very field, to consistently deliver the highest quality at significant savings over the cost of a new unit.

  All of our remanufactured equipment is guaranteed to meet original published manufactured specifications. In addition, we offer a some range of OEM upgrades, retrofits, field engineering support, custom maintenance contracts, and a large inventory of the spare parts used on the all semiconductor equipment.

  All remanufactured systems include installation and warranty. SYSTA understands that cost-effective system maintenance and upgrades are essential to any successful asset management program. SYSTA has a great reputation for quality, inventory availability, and on-time delivery with around 100 system in the world wide.

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Novellus Tool

Novellus Concept One, Two, Three

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Applied Matrials CVD Tool

AMAT P5000, Centura, Ultima

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Tool CIP

Remote Plasma Clean.. etc