Microwave Plasma Subsyste
PSK Inc.
$ 61,000.00
- OEM Part Number : MKS
- Quantity : 1 EA
- Condition : Used
PSK TERA21RC ETCHER CHAMBER , included MKS Microwave Plasma Subsystem , with Generator Rack(MKS FI20160-1 2ea) , , ASTEX FI20608 / AX7610PSK-S / FI20606 / FI20162-1 3.0Kw Mag Head , , MKS Microwave Plasma Subsystem , included PLASMA SOURCE components , - FI20160-1 3.0KW SmartPower : 2 ea , - FI20162-1 3.0KW Mag Head : 2 ea , - AX3151 3KW Circulator : 2 ea , - FI20608 Isolator : 2 ea , - FI20607 Precision Power Detector : 2 ea , - FI20606 3.0KW SmartMatch : 2 ea , - AX7610 Sapphire Tube custom config : 2 ea , (AX7610PSK-S) , ,