PSK 300mm Etcher MKS Micr
PSK Inc.
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- OEM Part Number :
- Quantity : 0 EA
- Condition : Used
MAKER : PSK INC. , MODEL : PSK TERA21RC Etcher CHAMBER , Description , , PSK TERA21RC Etcher CHAMBER , , included MKS Microwave Source (Plasma Subsystem) , with Generator Rack(MKS FI20160-1 2ea) , , ASTEX FI20608 / AX7610PSK-S / FI20606 / FI20162-1 3.0Kw Mag Head , , MKS Microwave Plasma Subsystem , included PLASMA SOURCE components , - FI20160-1 3.0KW SmartPower : 2 ea , - FI20162-1 3.0KW Mag Head : 2 ea , - AX3151 3KW Circulator : 1 ea , - FI20608 Isolator : 1 ea , - FI20607 Precision Power Detector : 1 ea , - FI20606 3.0KW SmartMatch : 2 ea , - AX7610 Sapphire Tube custom config : 2 ea , (AX7610PSK-S)